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| SEM & EDX |
| SEM (Scanning Electron Microscopy) |
| Used to inspect the surface of devices at high magnification. |
| DEX (Energy Dispersive X-Ray) |
| Used as a microanalysis system coupled with SEM for element analysis and contamination. | |
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| X-Ray Thickness Measurement |
Workstage : 400 *450mm Coating thickness measure and composition analysis. | |